DESCRIPTION
NE-Q05 is a small quartz vacuum plasma cleaner which is dedicated to cleaning and surface activation of a wide range of materials including polymers, metals, glass and ceramics, delivering optimum adhesion properties of otherwise difficult to bond materials.
NE-Q05 uses ICP plasma generation method, which has the characteristics of high plasma density and high dissociation rate. There is no electrode inside the vacuum chamber, which can avoid sputtering pollution.
Quartz glass is selected as the vacuum chamber material. Quartz glass is easy to clean, high temperature resistant, has certain strength, and RF power can be completely transmitted. It is an ideal vacuum chamber material.
2 independent inflatable pipeline. The multi-channel inflatable design can not only be flexibly filled with a single channel of different medium gases, but also can be filled with mixed gases, which is convenient for the later cleaning process.
The control system includes automatic process control, data acquisition and recording, security chain protection and other functions. The process parameters ( cleaning power, time, etc. ) can be set or modified, and the parameters in the process can be displayed and recorded at the same time. The historical data can be called and consulted at any time.
PARAMETER
Overall dimensions | Size | 510mm(L)×480mm(W) ×540 mm(H) |
Weight | 50KG(Including vacuum pump) | |
Plasma generator | Power | 0-200W(Adjustable) |
Frequency | 13.56Mhz, Solid-state RF power supply | |
Vacuum chamber | Cavity material | Quartz |
Discharge Mode | ICP | |
Cavity volume | 5L | |
Tray | 1 quartz tray | |
Cavity size | Φ150(W)×280(D)mm | |
Gas Control | flow value | 0-500ml |
Gas channel | 2 channels |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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