Plasma cleaning is a typical dry cleaning method. Compared with wet cleaning, plasma cleaning has no problems such as environmental protection and labor protection, and has high cleaning quality and simple process. Therefore, technology and process have developed rapidly in recent years. The advantages of plasma cleaning are mainly reflected in the following eight aspects : 

• It is an efficient and environmentally friendly cleaning method that does not use strong acids, alkalis and other solvents, and does not produce toxic and harmful waste water and waste gas after cleaning. Because the cleaned part does not contact the liquid and the temperature of the particle bombardment increases during the cleaning process, there is no need to dry after cleaning, which simplifies the process.

  
  

• After wet cleaning, the cleaned parts need to be rinsed with a large amount of deionized water, and then thoroughly dried. In the process of washing and drying, improper treatment is easy to cause secondary pollution. In a hot and humid environment, drying is also easy to cause oxidation of oxygen-free copper and other parts. Plasma cleaning does not require subsequent processes at all. Because the cleaning and cooling processes are in a vacuum environment, they will not cause oxidation.

  
  

• The RF plasma cleaning is different from the direct light such as laser, and the direction is not strong, so it can go deep into the slit and blind hole of the cleaned part to complete the cleaning, which has obvious advantages for those parts and parts that are difficult to clean by traditional methods. 

  
  

• The whole process of plasma cleaning can be completed in a few minutes to tens of minutes, and many parts can be cleaned at one time ( depending on the volume and power of the reaction chamber ), and the efficiency is very high. 

  
  

• Easy to use numerical control technology, high degree of automation ; with high precision control device, the accuracy of time control is very high.

  
  

• The vacuum and flow control requirements of the plasma cleaning machine are not high, there is no need for expensive manufacturing costs, it is easy to promote and popularize, and there is no need to purchase and store organic solvents in the later use, and the operating cost is much lower than the traditional wet cleaning. 

  
  

• Plasma cleaning can deal with different materials, such as metals, oxides, polymer materials, etc., and the temperature rise of the parts during the cleaning process is not high, which is suitable for materials that are not heat-resistant. When cleaning the components ( welded parts, composite parts of various materials ), mixed gas can be filled, and different cleaning mechanisms can be used for one-time cleaning. 

  
  

• While completing the cleaning and decontamination, it can also change the surface properties of the material itself. Such as improving the wettability of the surface, improving the surface adhesion, etc., which are very important in many applications. For example, before coating, the use of plasma cleaning parts, can improve the wetting properties of the surface of the parts, improve the adhesion of the film. 

  
  

• As a new type of dry cleaning, plasma cleaning has been more and more widely used. It not only reduces the production cost of enterprises, improves the production efficiency, but also effectively uses green resources and is beneficial to environmental ecological construction.