The LED material box plasma cleaning machine is mainly suitable for cleaning LED packaging substrates. It can effectively remove organic matter, oxides and particulate pollutants on its surface. Adding plasma cleaning before solid crystal, bonding and plastic sealing in the LED packaging process can effectively improve the pasting performance and bonding quality. The role of plasma cleaning in the entire LED packaging process mainly includes preventing encapsulation delamination, improving welding wire quality, increasing bonding strength, improving reliability, and increasing yield rate to save costs.

Compared with ordinary horizontal plasma cleaning machines, this LED material box plasma cleaning equipment adopts a vertical electrode design. When the reaction chamber is evacuated, the plasma generated by radio frequency excitation will move in a directional manner due to the layout of the positive and negative electrodes. The excited plasma can move horizontally under the guidance of the positive and negative electrodes, and then move obliquely downward under the combined action of the backward vacuum force and gravity, thereby ensuring that the plasma optimally impacts the surface of the cleaning material, thereby achieving the best cleaning effect and good uniformity.

By adjusting the coordination of the electrode plate assembly, the equipment can make it easier to place the LED material boxes, improve the uniformity of plasma cleaning of the LED bracket, and rationally optimize the layout of the electrode plate space to increase the number of LED material boxes in the vacuum chamber. Depending on the size of the material boxes, electrode racks suitable for 4, 8, and 16 material boxes can be made, thereby improving the efficiency of LED material box processing.