NE-PE05 is a small experimental plasma surface activation instrument, which is widely used in scientific research institutions, enterprise R&D units and small batch production. The equipment adopts CCP capacitive coupled plasma generation method. The whole system includes vacuum chamber, plasma generator, vacuum pump and air inlet and outlet. The processing chamber is made of cylindrical stainless steel. It can be used to improve the adhesion of substrate surface or improve the surface hydrophilicity. It is widely used in material bonding, coating, substrate coating or bonding.

Main uses/Applications: 1. Cleaning: removal of organic matter, oxides, metal salts, nano-particle pollutants, etc.; 2. Activation: hydrophilic and hydrophobic modification, surface energy enhancement, functional group introduction, biocompatibility improvement, etc.; 3. Etching: surface patterning, surface micro-etching, changing surface morphology roughness, etc.; 4. Bonding: bonding of microfluidic devices such as PDMS; 5. Debonding: photoresist ashing, bottom film scanning.