DESCRIPTION
NE-PE160F vacuum plasma cleaning machine is a medium-to-large-scale surface treatment equipment that uses plasma to clean the surface of materials to achieve the purpose of cleaning, activation, modification, etching, etc. It can be used for precision cleaning in industries such as semiconductors, microelectronics, pre-COG, LED processes, pre-device packaging, vacuum electronics, connectors and relays, activation of surfaces such as plastics, rubber, metals and ceramics, and life science experiments.
NE-PE160F is mainly composed of three parts: control unit, vacuum chamber and vacuum pump. Through CNC technology, various parameters can be easily adjusted. Because the cleaning process is carried out in the vacuum chamber, there is no need to dry after cleaning. It is simple to operate and environmentally friendly.
PARAMETER
Model | NE-PE160F |
Plasma Generator Frequency | RF 13.56MHz automatic impedance matching |
Ultimate vacuum degree | 10Pa |
Vacuum Pump | Oil pump/dry pump (optional) |
Power | 0-1000W adjustable |
Chamber Material | 316 stainless steel/aluminum alloy (optional) |
Chamber Size | 550(W)*600(D)*500(H)mm |
Chamber Volume | 165L |
Single layer effective treatment area | W510mm x D510mm |
Number of air paths | 2-way gas, supporting oxygen, argon, nitrogen, hydrogen, etc. |
Plate spacing | 54mm (adjustable) |
Number of processing layers | 8 layers (customizable) |
Control Mode | PLC+touch screen |
Power Supply | AC380V,50/60Hz |
Dimensions | 1170mm(L)×1190mm(W) ×1825 mm(H) |
Plasma
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