cryogenic radio frequency Low pressure plasma cleaning machine NE-PE160F
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DESCRIPTION

NE-PE160F vacuum plasma cleaning machine is a medium-to-large-scale surface treatment equipment that uses plasma to clean the surface of materials to achieve the purpose of cleaning, activation, modification, etching, etc. It can be used for precision cleaning in industries such as semiconductors, microelectronics, pre-COG, LED processes, pre-device packaging, vacuum electronics, connectors and relays, activation of surfaces such as plastics, rubber, metals and ceramics, and life science experiments.


NE-PE160F is mainly composed of three parts: control unit, vacuum chamber and vacuum pump. Through CNC technology, various parameters can be easily adjusted. Because the cleaning process is carried out in the vacuum chamber, there is no need to dry after cleaning. It is simple to operate and environmentally friendly.

PARAMETER

ModelNE-PE160F
Plasma Generator FrequencyRF 13.56MHz automatic impedance matching
Ultimate vacuum degree10Pa
Vacuum Pump
Oil pump/dry pump (optional)
Power
0-1000W adjustable
Chamber Material316 stainless steel/aluminum alloy (optional)
Chamber Size
550(W)*600(D)*500(H)mm
Chamber Volume165L
Single layer effective treatment areaW510mm x D510mm
Number of air paths2-way gas, supporting oxygen, argon, nitrogen, hydrogen, etc.
Plate spacing54mm (adjustable)
Number of processing layers8 layers (customizable)
Control ModePLC+touch screen
Power SupplyAC380V,50/60Hz
Dimensions1170mm(L)×1190mm(W) ×1825 mm(H)


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Contact
  • +86 173 0440 3275
  • sales@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
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