Low pressure plasma cleaning machine Low pressure plasma cleaning machine NE-PE40F
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DESCRIPTION

NE-PE40F is a small and medium-sized vacuum plasma cleaning machine, which is widely used in scientific research institutions, enterprise R&D units and small batch production proofing. Plasma cleaning machine is a cleaning equipment that uses plasma to remove pollutants on the surface of materials. The equipment adopts PLC touch screen control and automatic matching power supply. It quickly generates a vacuum pressure of 1-20 Pa through a vacuum pump. At the same time, according to customer process requirements, different mixed process gases are introduced into the vacuum reaction chamber to ionize the introduced process gas to generate plasma. During the working process, the high-energy particles in the plasma react chemically or physically bombard the surface pollutants, causing the pollutants to dissociate, oxidize or reduce to form volatile products, thereby achieving the effect of cleaning the surface pollutants.


NE-PE40F has the following advantages: (1) The plasma cleaning machine has high cleaning efficiency and a wide range of applications; (2) There are no requirements for the appearance, size, material, etc. of the cleaning sample; (3) During the cleaning process, the temperature rise is relatively small and can basically reach room temperature; (4) The RF power can be continuously adjusted, and the efficient special electrode is the guarantee for the generation of uniform plasma; (5) The unique overload, overheating and short-circuit protection circuit can ensure the stability and safety of the RF power supply; (6) The equipment adopts a modular design, and installation and maintenance are extremely simple.

PARAMETER

ModelNE-PE40F
Plasma Generator Frequency13.56MHz
Chamber MaterialStainless steel/aluminum alloy (optional)
Vacuum PumpOil pump/dry pump (optional)
Ultimate vacuum degree1Pa
Power0-300W (adjustable)
Chamber Size350(L)*405(D)*300(H)mm
Chamber Volume40L
Effective treatment area of chamber300(L)×300(D)mm
Number of air paths2-way gas, supporting oxygen, argon, nitrogen, hydrogen, etc.
Plate spacing34mm (adjustable)
Number of processing layers4 layers
Control Mode
PLC+touch screen
Power Supply
220V
Dimensions685mm(L) X 830m (w) X 1450mm (H)


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Contact
  • +86 173 0440 3275
  • sales@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
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