DESCRIPTION
NE-PE80F vacuum plasma cleaning equipment is mainly composed of vacuum chamber, high-frequency plasma power supply, vacuum generation and measurement system, process gas system, control system and other parts. The basic working principle is to use a vacuum pump to evacuate the working room to a certain vacuum degree, and then introduce process gas. Under the action of the high-frequency generator, a high-frequency alternating electric field is formed between the anode and the cathode to ionize the gas and form plasma. When the gas reaches the plasma state, the gaseous molecules will split into many highly active particles. The mechanism of plasma cleaning relies on the "activation" of substances in the "plasma state" to achieve the purpose of removing stains on the surface of objects or improving surface activity. It can be used to improve the adhesion, hydrophilicity, printing and other properties of products, and can also be used to remove organic matter, oil stains, oxide layers and other pollutants on the surface of materials.
PARAMETER
Model | NE-PE80F |
Plasma Generator Frequency | RF 13.56MHz automatic impedance matching |
Ultimate vacuum degree | 1Pa |
Vacuum Pump | Oil pump/dry pump (optional) |
Power | 500W/1000W(adjustable) |
Chamber Material | 316 stainless steel/aluminum alloy (optional) |
Chamber Size | 450(W)*465(D)*355(H)mm |
Chamber Volume | 80L |
Effective treatment area of chamber | W410mm x D390mm |
Number of air paths | 2-way gas, supporting oxygen, argon, nitrogen, hydrogen, etc. |
Plate spacing | 45mm (adjustable) |
Number of processing layers | 6 layers |
Control Mode | PLC+touch screen |
Power Supply | AC380V,50/60Hz |
Dimensions | 1100mm(L)×1145mm(W) ×1760 mm(H) |
Plasma
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