PARAMETER
Model | NE-PE60F |
Cavity material | Stainless steel or aluminum alloy optional |
Power | 0-600W |
Plasma generator frequency | 13.56MHz |
Control method | 10 -inch touch screen (automatic+manual mode) |
Extreme vacuum | 2Pa |
Gas channel | 3 |
Equipment power | S 3KW |
Vacuum work | 10 ~ 150Pa |
Reaction warehouse size (w*h*d) | 450*360*470 |
Dimensions (W*H*D) | 1100*1850*1200 |
Power supply | AC380V/50Hz |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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